Interface Young’s Modulus (GPa)

Indentation load (N)

h_max = 10% of film thickness

h_max = 20% of film thickness

h_max = half film thickness

238

20.15

36.10

70.88

200

20.10

36.01

70.73

100

20.04

35.95

70.68

50

19.94

35.84

70.60

20

19.67

35.52

70.35

10

19.25

35.04

69.97

9.0

19.17

34.95

69.90

8.0

19.06

34.84

69.80

7.0

18.94

34.72

69.68

6.0

18.78

34.54

69.53

5.0

18.57

34.32

69.34

4.0

18.27

34.04

69.06

3.0

17.82

33.54

68.66

2.0

17.06

32.71

68.02

1.0

15.42

31.14

66.85